Description Industrial MEMS Integrated Flow Temperature Pressure sensor for Humidity
FS6100 series mass flow sensors offer a unique solution for multi-parameter flow measurement with mass flow, gauge pressure, temperature, and humidity. It is designed for industrial process measurement and can also be applied for general purpose flow metering and control applications, such as compressed air where high flow rate data are required. The current models can be readily applied to food and beverage processes, industrial air management, and many process control applications.FS6100 has a pressure rating over 1.o MPa and opted with gas concentration measurement for two gas mixture. With a 50 mm (2”) diameter, it can measure up to 10000 SLPM air.
Detailed Images Industrial MEMS Integrated Flow Temperature Pressure sensor for Humidity
Specification Industrial MEMS Integrated Flow Temperature Pressure sensor for Humidity
| Specifications |
| Flow | Range | 0~100 (6110) / 0~10000 (6150) | SLPM |
| | Accuracy | ±(2.0+0.5FS) | % |
| Pressure | Range | 0~1.0 (gauge) | MPa |
| | Accuracy | ±1.0 | % |
| Temperature | Range | -10 ~ 60 | Vdc |
| | Accuracy | ±0.5 | % |
| Humidity* | Range | 0~100 (no condensation) | %RH |
| | Accuracy | ±2.0 (20~80%RH); ±5.0, others | % |
| | Humidity response | 5.0 (25~75%RH) | sec |
| | Other response time | 50 | msec |
| | Power supply | 8~24 | Vdc |
| | Compensation range | -5 ~ 60 | °C |
| | Output | I2C / RS485 / 4~20mA | |
| | Mechanical | BSPP / NPT | |
| | Pin-out | 6 pins, AMPMODU MTE, or compatible | |
| | Calibration | Air @ 20°C, 101.325 kPa (flow, pressure) | |
| | Storage temperature | -20 ~ 70 | °C |
Note: Parameters specified at the calibration conditions. For detailed specifications, refer to the manual. Humidity sensing may require long sensing stable time, not recommended for nonessential applications.
Application Industrial MEMS Integrated Flow Temperature Pressure sensor for Humidity
applied to food and beverage processes, industrial air management, and many process control applications.
Dimension Industrial MEMS Integrated Flow Temperature Pressure sensor for Humidity
Selection Guide Industrial MEMS Integrated Flow Temperature Pressure sensor for Humidity
FAQ
A:We will contact you as soon as possible but within 12 hours
Q: Can I get some samples?
A: Yes, Sample order is available for quality check and market test. But you have to pay the express cost.
Q: How soon can you arrange your production?
A: Once getting your product confirmation and receiving the prepayment, the production will be started immediately.
Q: What's delivery time?
A: It usually takes about 3-5 working days for small order and 10-15 days for big order.
Q:How do you control your quality ?
A: Three inspection steps(of original, production, and finished goods) + good warranty service(1 year free to change a new one without any human damage factors).
Q: What certificates do you have ?
A:ISO9000, CE, Explosion-proof certification, RoHs ready. And before the delievry of goods, quality and safety inspection certification issued by third parts also can be offered.
Q:Could I visit your factory?
A:Very welcome! Fly to Xian Yang air port. It was a big pleasure for us.
Q: What's your warranty terms?
A: We offer 12 months warranty time.
Q:can you provide OEM & Customized service?
A:Yes, OEM and ODM are both available, we have the professional R&D dept which can provide professional solutions for you.
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